The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Dec. 06, 2016
Applicants:
Stichting Vu-vumc, Amsterdam, NL;
Fom-nikhef, Amsterdam, NL;
Inventors:
Eric Hennes, Amsterdam, NL;
Alessandro Bertolini, Diemen, NL;
Johannes Franciscus Van Den Brand, Hilversum, NL;
Assignees:
STICHTING VU-VUMC, Amsterdam, NL;
FOM-NIKHEF, Amsterdam, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/13 (2006.01); G01P 15/125 (2006.01); B81B 3/00 (2006.01); G01P 15/08 (2006.01); G01P 15/09 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0078 (2013.01); G01P 15/0802 (2013.01); G01P 15/0907 (2013.01); G01P 15/125 (2013.01); G01P 15/131 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0285 (2013.01); B81B 2203/0163 (2013.01);
Abstract
A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to the support structure; and, a proof mass flexibly suspended by the suspension springs; wherein at least one of the suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.