The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
May. 16, 2018
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventor:
Benny Pekka Herzogenrath, Wuppertal, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0051 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/04 (2013.01); B81B 2203/051 (2013.01); B81B 2207/07 (2013.01);
Abstract
A micromechanical sensor includes a first functional layer, a second functional layer, and a third functional layer The second functional layer is situated between the first and third functional layers. The second and third functional layers are connected to each other by a connecting area of the third functional layer. The second functional layer is underneath the connecting area at a defined distance from the first functional layer. The first functional layer is underneath the connecting area on an oxide that is situated on a substrate.