The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2020

Filed:

May. 13, 2016
Applicant:

Commissariat À L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Bruno Imbert, Grenoble, FR;

Lamine Benaissa, Grenoble, FR;

Paul Gondcharton, Grenoble, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 20/02 (2006.01); H01L 21/18 (2006.01); H01L 23/00 (2006.01); C22F 1/18 (2006.01); B23K 103/00 (2006.01); B23K 101/42 (2006.01); B23K 103/08 (2006.01);
U.S. Cl.
CPC ...
B23K 20/02 (2013.01); C22F 1/18 (2013.01); H01L 21/187 (2013.01); H01L 24/83 (2013.01); B23K 2101/42 (2018.08); B23K 2103/08 (2018.08); B23K 2103/50 (2018.08); H01L 2224/83896 (2013.01); H01L 2224/83948 (2013.01);
Abstract

A method includes steps a) providing the first structure successively including a first substrate, a first layer made from a metal base and a first metal-based metal oxide, b) providing the second structure successively including a second substrate, a second layer made from a second material and a second metal-based metal oxide, the first and second metal oxides presenting a standard free enthalpy of formation ΔG°, the second material being chosen so that it has an oxide presenting a standard free enthalpy of formation strictly less than ΔG°, c) bonding the first structure and second structure by direct adhesion, d) activating diffusion of the oxygen atoms of the first and second metal oxides to the second layer so as to form the oxide of the second material.


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