The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2020

Filed:

Aug. 27, 2018
Applicant:

Newport Fab, Llc, Newport Beach, CA (US);

Inventors:

Jefferson E. Rose, Hawthorne, CA (US);

Gregory P. Slovin, Irvine, CA (US);

David J. Howard, Irvine, CA (US);

Michael J. DeBar, Tustin, CA (US);

Nabil El-Hinnawy, Irvine, CA (US);

Assignee:

Newport Fab, LLC, Newport Beach, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/768 (2006.01); H01L 45/00 (2006.01); H01L 23/66 (2006.01); H01L 23/525 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76877 (2013.01); H01L 21/76802 (2013.01); H01L 21/76843 (2013.01); H01L 21/76879 (2013.01); H01L 21/76885 (2013.01); H01L 23/525 (2013.01); H01L 23/66 (2013.01); H01L 45/06 (2013.01); H01L 45/065 (2013.01); H01L 45/126 (2013.01); H01L 45/1226 (2013.01); H01L 45/1286 (2013.01); H01L 45/143 (2013.01); H01L 45/144 (2013.01); H01L 45/1675 (2013.01);
Abstract

In fabricating a radio frequency (RF) switch, a phase-change material (PCM) and a heating element, underlying an active segment of the PCM and extending outward and transverse to the PCM, are provided. Lower portions of PCM contacts for connection to passive segments of the PCM are formed, wherein the passive segments extend outward and are transverse to the heating element. Upper portions of the PCM contacts are formed from a lower interconnect metal. Heating element contacts are formed cross-wise to the PCM contacts. The heating element contacts can comprise a top interconnect metal directly connecting with terminal segments of the heating element. The heating element contacts can comprise a top interconnect metal and intermediate metal segments for connecting with the terminal segments of the heating element.


Find Patent Forward Citations

Loading…