The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2020

Filed:

Aug. 22, 2016
Applicant:

Element Six Technologies Limited, Didcot, Oxfordshire, GB;

Inventors:

John Robert Brandon, Didcot, GB;

Neil Perkins, Didcot, GB;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/27 (2006.01); C23C 16/511 (2006.01); H01J 37/244 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3299 (2013.01); C23C 16/274 (2013.01); C23C 16/511 (2013.01); H01J 37/244 (2013.01); H01J 37/32192 (2013.01); H01J 37/32201 (2013.01); H01J 37/32266 (2013.01); H01J 37/32935 (2013.01); H01J 37/32944 (2013.01); H01J 2237/24592 (2013.01); H01J 2237/3321 (2013.01); H05H 2001/4607 (2013.01); H05H 2001/4622 (2013.01);
Abstract

A microwave generator system for use in a microwave plasma enhanced chemical vapour deposition (MPECVD) system, the microwave generator system comprising: a microwave generator unit configured to produce microwaves at an operating power output suitable for fabricating synthetic diamond material via a chemical vapour deposition process; a fault detection system configured to detect a fault in the microwave generator unit which results in a reduction in the operating power output or a change in frequency; and a re-start system configured to restart the microwave generator unit in response to a fault being detected and recover the operating power output or frequency in a time period of less than 10 seconds after the fault in the microwave generator unit which caused the reduction in the operating power output or the change in frequency.


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