The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2020

Filed:

May. 10, 2019
Applicant:

Gatan, Inc., Pleasanton, CA (US);

Inventors:

John Andrew Hunt, Fremont, CA (US);

Michael Bertilson, Dublin, CA (US);

Tom Worsley, Chipping Norton, GB;

Assignee:

Gatan, Inc., Pleasanton, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/06 (2006.01); H01J 37/22 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/261 (2013.01); G02B 21/06 (2013.01); H01J 37/22 (2013.01);
Abstract

An apparatus for collection, distribution, and analysis of cathodoluminescence (CL) and other light signals in an electron microscope is provided. The optical hub, utilizing a linear-translating fold-mirror and mounted to the electron microscope, is used to receive essentially collimated light collected from a collection-mirror and efficiently route the collected light to a plurality of light-analysis instruments. The linear-translating fold-mirror can provide fine positional alignment of the light signal, and in an aspect of the invention can be used to select or scan a portion of the collected light-pattern into an optical slit or aperture. In one aspect, the optical hub includes a light filter mechanism that can track the movement of the fold-mirror. In an aspect, the optical hub also controls the positioning of the collection-mirror in proximity to the specimen being analyzed.


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