The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2020
Filed:
May. 15, 2019
Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;
Kotaro Takijiri, Kyoto, JP;
Yusuke Kanamaru, Kyoto, JP;
Emiko Nakagawa, Kyoto, JP;
Yuki Tanaka, Kyoto, JP;
HORIBA STEC, Co., Ltd., Kyoto-shi, Kyoto, JP;
Abstract
A fluid control device is adapted to include: a valve provided in a flow path through which a fluid flows; a pressure sensor provided upstream of the valve; a flow rate sensor provided on downstream of the pressure sensor; a set flow rate generator that outputs a set flow rate corresponding to the measured pressure on the basis of a pressure-flow rate map; a valve control part that controls the opening level of the valve so that the deviation between the set flow rate and a measured flow rate decreases; and the set flow rate generator that outputs the set flow rate corresponding to the measured pressure to the valve control part. In addition, the set flow rate generator is adapted to control the set flow rate so that the measured pressure has a value up to a limit pressure.