The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2020
Filed:
Mar. 02, 2018
Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;
HORIBA STEC, Co., Ltd., Kyoto-shi, Kyoto, JP;
Abstract
In order to restrain generation of a peak in the measured flow rate, a fluid control unit measures a flow rate of a fluid in a channel and outputs a signal indicating a valve operation amount of a fluid control valve obtained based on a deviation between a preset flow rate and a measured flow rate and a control coefficient, and the control coefficient for a stable state and the control coefficient for a transitional state are so set to moderate fluctuation of the valve operation amount to the deviation more in the transitional state than in the stable state. At or shortly after a timing when the stable state is switched to the transitional state, a signal is output that indicates an operation amount for a switching time calculated based on each of the operation amounts output at a plurality of timings in the stable state.