The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2020

Filed:

Apr. 28, 2015
Applicant:

Screen Holdings Co., Ltd., Kyoto-shi, Kyoto, JP;

Inventor:

Yasushi Nagata, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G06T 7/00 (2017.01); G01N 21/88 (2006.01); G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
G01N 21/95 (2013.01); G01N 21/88 (2013.01); G01N 21/8806 (2013.01); G01N 21/8851 (2013.01); G01N 21/95607 (2013.01); G01N 21/95684 (2013.01); G06T 7/001 (2013.01); G01N 2021/8816 (2013.01); G01N 2021/8867 (2013.01); G01N 2201/062 (2013.01); G06T 2207/10152 (2013.01);
Abstract

In an inspection apparatus, light source parts for irradiating an object area on a surface of an object with light from directions, respectively, are provided, and a first picked-up image representing an object area is acquired in one image pickup part by light irradiation from one of the light source parts and a second picked-up image is acquired in the image pickup part by light irradiation from the light source parts. A first defect candidate area is detected by comparing the first picked-up image with a first reference image corresponding to the first picked-up image and a second defect candidate area is detected by comparing the second picked-up image with a second reference image corresponding to the second picked-up image. An overlapping area in the first defect candidate area and the second defect candidate area is specified as a defect area in the object area.


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