The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2020

Filed:

Nov. 22, 2017
Applicant:

Ckd Corporation, Aichi, JP;

Inventors:

Hiroyuki Ishigaki, Aichi, JP;

Takahiro Mamiya, Aichi, JP;

Assignee:

CKD CORPORATION, Aichi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/24 (2006.01); G01J 3/02 (2006.01); H01L 21/66 (2006.01); H05K 3/00 (2006.01);
U.S. Cl.
CPC ...
G01B 9/0203 (2013.01); G01B 9/02007 (2013.01); G01B 9/02011 (2013.01); G01B 9/02018 (2013.01); G01B 9/02024 (2013.01); G01B 9/02027 (2013.01); G01B 9/02057 (2013.01); G01B 9/02079 (2013.01); G01B 9/02081 (2013.01); G01B 11/2441 (2013.01); G01J 3/0205 (2013.01); H01L 22/12 (2013.01); H05K 3/00 (2013.01); G01B 2290/45 (2013.01); G01B 2290/70 (2013.01);
Abstract

A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images.


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