The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2020

Filed:

May. 10, 2017
Applicant:

Arizona Board of Regents on Behalf of Arizona State University, Scottsdale, AZ (US);

Inventors:

Franz A. Koeck, Tempe, AZ (US);

Robert J. Nemanich, Scottsdale, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/12 (2006.01); C30B 25/10 (2006.01); C23C 16/46 (2006.01); C30B 25/02 (2006.01); C23C 16/44 (2006.01); C23C 16/00 (2006.01); C30B 25/00 (2006.01);
U.S. Cl.
CPC ...
C30B 25/10 (2013.01); C30B 25/12 (2013.01); C23C 16/00 (2013.01); C23C 16/44 (2013.01); C23C 16/46 (2013.01); C23C 16/463 (2013.01); C23C 16/466 (2013.01); C30B 25/00 (2013.01); C30B 25/02 (2013.01); Y10T 117/00 (2015.01); Y10T 117/10 (2015.01); Y10T 117/1016 (2015.01);
Abstract

Apparatuses and methods are provided for manufacturing diamond electronic devices. The apparatus includes a base comprising a water-block and a cover that at least partially covers the water-block. The apparatus includes a sample stage disposed on the base. The apparatus further includes a sample holder disposed on the sample stage and configured to accept a diamond substrate. The apparatus includes controlled thermal interfaces between water-block, sample stage, sample holder and diamond substrate.


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