The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2020
Filed:
Dec. 11, 2014
Applicant:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventors:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Chuo-ku, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); C23C 16/30 (2006.01); C23C 16/32 (2006.01); C23C 16/34 (2006.01); C23C 16/507 (2006.01); C23C 16/54 (2006.01); H01B 1/04 (2006.01); H05K 1/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/50 (2013.01); C23C 16/308 (2013.01); C23C 16/325 (2013.01); C23C 16/345 (2013.01); C23C 16/507 (2013.01); C23C 16/545 (2013.01); H01B 1/04 (2013.01); H05K 1/028 (2013.01);
Abstract
A laminated film includes a flexible base material, a first thin film layer formed on at least one of surfaces of the base material, and a second thin film layer formed on the first thin film layer, and the first thin film layer contains a silicon atom (Si), an oxygen atom (O) and a carbon atom (C), the second thin film layer contains a silicon atom, an oxygen atom and a nitrogen atom (N), and the first thin film layer and the second thin film layer are formed by using glow discharge plasma.