The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2020

Filed:

Jun. 19, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Ageeth A Bol, Yorktown Heights, NY (US);

Xuesong Li, Yorktown Heights, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/26 (2006.01); C01B 32/186 (2017.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
C23C 16/26 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 32/186 (2017.08); C23C 16/4582 (2013.01);
Abstract

An apparatus and method for graphene film synthesis. The apparatus includes a quasi-enclosed substrate holder which includes one open side, a cap disposed over the one open side of the quasi enclosed substrate holder, and a substrate for graphene film synthesis located inside the quasi enclosed substrate holder. The method includes placing a substrate for graphene film synthesis inside of a quasi-enclosed substrate holder and generating a graphene film on the substrate via chemical vapor deposition, wherein the quasi enclosed substrate holder includes one open side and a cap disposed over the open side of the quasi enclosed substrate holder.


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