The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2020

Filed:

Sep. 13, 2016
Applicant:

L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;

Inventors:

Sayaka Suzuki, Tokyo, JP;

Terumasa Koura, Tokyo, JP;

Fumikazu Nozawa, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 23/00 (2006.01); B01D 53/04 (2006.01); B01D 53/02 (2006.01);
U.S. Cl.
CPC ...
C01B 23/001 (2013.01); B01D 53/02 (2013.01); B01D 2256/18 (2013.01); B01D 2257/104 (2013.01); B01D 2257/11 (2013.01); B01D 2258/0216 (2013.01); C01B 2210/005 (2013.01); C01B 2210/0006 (2013.01); C01B 2210/0017 (2013.01); C01B 2210/0023 (2013.01); C01B 2210/0032 (2013.01); C01B 2210/0045 (2013.01); C01B 2210/0046 (2013.01); C01B 2210/0051 (2013.01); C01B 2210/0062 (2013.01); C01B 2210/0084 (2013.01);
Abstract

A neon recovering/purifying system including: a recovery vessel that is arranged on an exhaust gas route and stores exhaust gas, the exhaust gas route being branched and extending from a discharge line; a compressor that increases a pressure of the exhaust gas sent out from the recovery vessel, to a third pressure; an exhaust gas flow rate regulating unit that regulates a flow rate of the exhaust gas whose pressure has been increased by the compressor; a first impurity removing unit that removes a first impurity from the exhaust gas; a second impurity removing unit that removes a second impurity from the exhaust gas from which the first impurity has been removed; a pressure increasing vessel that stores purified gas that has been processed by the first impurity removing unit and the second impurity removing unit; a pressure reducing valve that reduces a pressure of the purified gas sent out from the pressure increasing vessel, to the first pressure; and a purified gas flow rate regulating unit that regulates a flow rate of the purified gas supplied to a supply line of a manufacturing system.


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