The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

Nov. 21, 2018
Applicant:

Taiyo Yuden Co., Ltd., Tokyo, JP;

Inventors:

Shinpei Miura, Tokyo, JP;

Satoshi Imasu, Tokyo, JP;

Takashi Matsuda, Tokyo, JP;

Masafumi Iwaki, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/145 (2006.01); H03H 3/08 (2006.01); H03H 9/02 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01); H03H 9/72 (2006.01); H01L 41/047 (2006.01);
U.S. Cl.
CPC ...
H03H 9/14541 (2013.01); H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/02637 (2013.01); H03H 9/02866 (2013.01); H03H 9/02897 (2013.01); H03H 9/02929 (2013.01); H03H 9/25 (2013.01); H03H 9/6436 (2013.01); H03H 9/6483 (2013.01); H03H 9/725 (2013.01); H01L 41/0477 (2013.01); H03H 9/02826 (2013.01); H03H 9/02834 (2013.01); H03H 9/6489 (2013.01);
Abstract

An acoustic wave device includes: a piezoelectric substrate; and a pair of comb-shaped electrodes that is located on the piezoelectric substrate, includes a metal film, and excites a surface acoustic wave, the metal film being mainly composed of a metal having a melting point equal to or higher than a melting point of Pt, the metal film having a first region in which a crystal grain has a columnar shape and a second region that is located on and/or under the first region in a stacking direction and has less crystallinity than the first region or has an amorphous structure.


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