The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

Jun. 21, 2016
Applicants:

Pavel Borodulin, Baltimore, MD (US);

Nabil Abdel-meguid El-hinnawy, Columbia, MD (US);

Robert Miles Young, Ellicott City, MD (US);

Inventors:

Pavel Borodulin, Baltimore, MD (US);

Nabil Abdel-Meguid El-Hinnawy, Columbia, MD (US);

Robert Miles Young, Ellicott City, MD (US);

Assignee:

NORTHROP GRUMMAN SYSTEMS CORPORATION, Falls Church, VA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 11/00 (2006.01); H01L 45/00 (2006.01); G11C 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 45/06 (2013.01); H01L 45/1206 (2013.01); H01L 45/1226 (2013.01); H01L 45/1286 (2013.01); H01L 45/144 (2013.01); H01L 45/1666 (2013.01); G11C 13/0004 (2013.01); Y10T 29/49105 (2015.01);
Abstract

One example includes a method for making a switch. The method includes forming an insulating layer over a substrate. The method also includes forming a resistive heating material over the insulating layer. The method also includes depositing a thermally conductive electrically insulating barrier layer over the heating material. The method also includes forming a phase-change material (PCM) component over the barrier layer spaced apart and proximal to the resistive heating material. The method also includes forming a quench layer proximal to at least one of the resistive heating material and the PCM component. The method further includes forming conductive lines from ends of the PCM component and control lines from ends of the resistive heating material.


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