The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Mar. 27, 2017
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); B32B 5/00 (2006.01); C04B 35/64 (2006.01); H01L 41/18 (2006.01); C23C 14/34 (2006.01); C23C 14/16 (2006.01); H01L 41/316 (2013.01); C23C 14/08 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
H01L 41/18 (2013.01); C23C 14/088 (2013.01); C23C 14/165 (2013.01); C23C 14/3414 (2013.01); H01L 41/047 (2013.01); H01L 41/0805 (2013.01); H01L 41/1873 (2013.01); H01L 41/316 (2013.01);
Abstract
A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABOas a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least Nb (niobium), the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains; and the average particle diameter of the crystal grains is larger than 3 μm and not larger than 30 μm.