The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Jan. 23, 2018
Vanguard International Semiconductor Corporation, Hsinchu, TW;
Chia-Hao Lee, New Taipei, TW;
Manoj Kumar, Dhanbad, IN;
Chang-Xiang Hung, Budai Township, TW;
Chih-Cherng Liao, Jhudong Township, TW;
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION, Hsinchu, TW;
Abstract
A semiconductor device includes a first gallium nitride layer disposed on a semiconductor substrate, and an aluminum gallium nitride layer disposed on the first gallium nitride layer. The semiconductor device also includes an upper recess and a lower recess disposed in the aluminum gallium nitride layer, wherein the upper recess adjoins the lower recess, and the upper recess has a width that is greater than that of the lower recess. The semiconductor device further includes a second gallium nitride layer disposed in the first recess and the second recess, and a gate structure disposed on the second gallium nitride layer. In addition, the semiconductor device includes a source electrode and a drain electrode disposed on the aluminum gallium nitride layer.