The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Jul. 12, 2019
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeeongi-do, KR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01); H01L 27/22 (2006.01); G01N 21/88 (2006.01); H01L 43/12 (2006.01); G01N 21/95 (2006.01); H01L 43/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67288 (2013.01); G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); H01L 22/12 (2013.01); H01L 27/228 (2013.01); H01L 43/02 (2013.01); H01L 43/12 (2013.01);
Abstract
An inspection apparatus includes a first optical module including a first light source configured to emit first light to a semiconductor structure, a second light source configured to emit second light different from the first light to a portion adjacent to a portion to which the first light is emitted in the semiconductor structure, a detector configured to detect the second light reflected toward the second light source, and a lock-in amplifier connected to the first optical module and the detector.