The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Jun. 01, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Joseph M. Ranish, San Jose, CA (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F21V 8/00 (2006.01); G02B 6/00 (2006.01); H05B 3/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); G02B 6/00 (2013.01); G02B 6/0005 (2013.01); H05B 3/0047 (2013.01);
Abstract
A processing chamber is described. The processing chamber includes a chamber having an interior volume, a light pipe array coupled to the chamber, the light pipe array comprising a wall member that defines a boundary of the interior volume of the chamber, wherein the light pipe array includes a plurality of non-metallic light pipe structures, and a radiant heat source comprising a plurality of energy sources in optical communication with each of the plurality of light pipe structures.