The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Aug. 28, 2015
Applicant:
Bühler Ag, Uzwil, CH;
Inventors:
Daniel Theodore Crowley, Owatonna, MN (US);
Patrick Lawrence Morse, Tucson, AZ (US);
Assignee:
Bühler AG, Uzwil, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3435 (2013.01); H01J 37/342 (2013.01); H01J 37/3417 (2013.01); H01J 37/3423 (2013.01); H01J 37/3444 (2013.01); H01J 37/3464 (2013.01);
Abstract
A rotary sputtering cathode assembly is provided that comprises a rotatable target cylinder having a first end and an opposing second end. A first power transfer apparatus is configured to carry radio frequency power to the first end of the target cylinder, and a second power transfer apparatus is configured to carry radio frequency power to the second end of the target cylinder. Radio frequency power signals are simultaneously delivered to both of the first and second ends of the target cylinder during a sputtering operation.