The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Apr. 17, 2018
Applied Materials, Inc., Santa Clara, CA (US);
Tien Fak Tan, Campbell, CA (US);
Saravjeet Singh, Sunnyvale, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Tae Wan Kim, San Jose, CA (US);
Kenneth D. Schatz, Los Altos, CA (US);
Tae Seung Cho, San Jose, CA (US);
Lok Kee Loh, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An apparatus for distributing plasma products includes first and second electrodes that each include planar surfaces. The first electrode forms first apertures from a first planar surface to a second planar surface; the second electrode forms second apertures from the third planar surface to the fourth planar surface. The electrodes couple through one or more adjustable couplers such that the third planar surface is disposed adjacent to the second planar surface with a gap therebetween, the gap having a gap distance. Each of the adjustable couplers has a range of adjustment. The first and second apertures are arranged such that for at least one position within the ranges of adjustment, none of the first apertures aligns with any of the second apertures to form an open straight-line path extending through both the first and second electrodes, and the gap distance is between 0.005 inch and 0.050 inch.