The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

Sep. 26, 2017
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Naoki Ohta, Tokyo, JP;

Hirokazu Takahashi, Tokyo, JP;

Satoshi Miura, Tokyo, JP;

Assignee:

TDK Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/02 (2006.01); G01R 33/09 (2006.01); G01R 33/00 (2006.01);
U.S. Cl.
CPC ...
G01R 33/0206 (2013.01); G01R 33/0052 (2013.01); G01R 33/093 (2013.01); G01R 33/098 (2013.01);
Abstract

A triaxial magnetic sensor that can detect with high precision magnetic fields in three axial directions comprises a substrate having a first surface and a second surface opposite the first surface, and a magnetic sensor element group provided on the first surface. The magnetic sensor element group includes a first magnetic sensor element for magnetic detection in the x-axis direction, a second magnetic sensor element for magnetic detection in the y-axis direction and a third magnetic sensor element for magnetic detection in the z-axis direction. The first through third magnetic sensor elements respectively contain first through third magneto-resistive effect elements composed of laminated bodies including at least a magnetization fixed layer and a free layer, and the magnetization direction of each of the magnetization fixed layers of the first through third magneto-resistive elements is fixed in a direction inclined at a prescribed angle with respect to the first surface.


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