The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

Mar. 08, 2018
Applicant:

United States of America As Represented BY the Administrator of Nasa, Washington, DC (US);

Inventors:

Jin-Woo Han, San Jose, CA (US);

Meyya Meyyappan, San Jose, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/10 (2006.01); G01R 31/28 (2006.01); H01L 23/34 (2006.01); G01R 31/26 (2020.01);
U.S. Cl.
CPC ...
G01R 31/2856 (2013.01); G01R 31/2644 (2013.01); G01R 31/2863 (2013.01); G01R 31/2874 (2013.01); G01R 31/2875 (2013.01); H01L 23/345 (2013.01); H01L 2224/16 (2013.01); H01L 2224/48247 (2013.01); H01L 2924/00 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A self-healing microchip comprising a commercial-off-the-shelf (COTS) microchip lacking radiation shielding. The self-healing microchip includes one or more microheaters that are integrated directly upon a surface of the COTS microchip, a self-test circuit which detects a degradation in the COTS microchip, and one or more temperature sensors. The one or more microheaters may be formed directly upon a backside surface of the COTS microchip using tungsten sputtered shadow mask patterning or by lithography and etching, for example. In response to a detected degradation in the COTS microchip, a temperature control configures an output temperature generated by the one or more microheaters and an amount of time at which the output temperature is maintained to cause annealing in the microchip responsive to the detected degradation in the COTS microchip.


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