The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Aug. 07, 2018
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventor:
Richard Alan Gottscho, Pleasanton, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 3/56 (2006.01); H01J 37/32 (2006.01); C23C 16/50 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01N 3/56 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01); H01J 37/32009 (2013.01); H01J 37/3244 (2013.01); H01J 37/3299 (2013.01); H01J 37/32935 (2013.01); H01L 21/67069 (2013.01); H01L 21/67253 (2013.01);
Abstract
A consumable part having a body with a surface is configured to be exposed to plasma during processing in a chamber. The consumable part includes a trigger feature disposed in the body. The trigger feature includes a void, and the void is an identifiable feature on the surface of the body to identify a wear level of the consumable part. The wear level is correlated to a lifetime remaining for the consumable part.