The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Jan. 16, 2018
Applicant:
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Inventors:
Hideaki Adachi, Osaka, JP;
Ryouichi Takayama, Osaka, JP;
Takakiyo Harigai, Kyoto, JP;
Yoshiaki Tanaka, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/68 (2006.01); H01L 41/312 (2013.01); H01L 41/27 (2013.01); H01L 41/319 (2013.01); C30B 29/20 (2006.01); C30B 23/02 (2006.01); C30B 29/32 (2006.01); C30B 29/26 (2006.01); C30B 29/16 (2006.01); H01L 41/313 (2013.01); H01L 41/316 (2013.01); H01F 41/18 (2006.01); H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
C30B 29/68 (2013.01); C30B 23/025 (2013.01); C30B 29/16 (2013.01); C30B 29/20 (2013.01); C30B 29/26 (2013.01); C30B 29/32 (2013.01); H01L 41/27 (2013.01); H01L 41/312 (2013.01); H01L 41/313 (2013.01); H01L 41/319 (2013.01); H01F 41/18 (2013.01); H01L 41/187 (2013.01); H01L 41/316 (2013.01);
Abstract
The present invention provides a thin film structural body comprising a sapphire substrate having a principal plane of a {11-26} plane and a first epitaxial thin film which is grown directly on the principal plane of the sapphire substrate and has a principal plane of a {100} plane. As one example, in a fabrication method of the thin film structural body, a first epitaxial thin film is grown on a principal plane of a {11-26} plane of the sapphire substrate. The grown first epitaxial thin film has a principal plane of a {100} plane.