The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

Nov. 01, 2016
Applicants:

Panasonic Corporation, Osaka, JP;

Riken, Saitama, JP;

Inventors:

Norimichi Noguchi, Osaka, JP;

Takuya Mino, Osaka, JP;

Takayoshi Takano, Osaka, JP;

Jun Sakai, Osaka, JP;

Hitomichi Takano, Osaka, JP;

Kenji Tsubaki, Osaka, JP;

Hideki Hirayama, Saitama, JP;

Assignees:

PANASONIC CORPORATION, Osaka, JP;

RIKEN, Saitama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/40 (2006.01); C23C 16/34 (2006.01); C30B 25/18 (2006.01); H01L 21/205 (2006.01); H01L 21/20 (2006.01); H01L 33/22 (2010.01); C30B 29/38 (2006.01); H01L 21/02 (2006.01); C30B 29/68 (2006.01); B32B 3/30 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
C30B 29/403 (2013.01); C23C 16/34 (2013.01); C30B 25/18 (2013.01); C30B 29/38 (2013.01); C30B 29/68 (2013.01); H01L 21/0242 (2013.01); H01L 21/0243 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02458 (2013.01); H01L 21/02502 (2013.01); H01L 21/02513 (2013.01); H01L 21/20 (2013.01); H01L 21/205 (2013.01); H01L 33/22 (2013.01); B32B 3/30 (2013.01); H01L 21/02389 (2013.01); H01L 33/0075 (2013.01); Y10T 428/24612 (2015.01);
Abstract

An epitaxial substrate includes: a single crystal substrate including projections arranged in an array on a plane. Each projection has a conical or pyramidal shape tapered in a normal direction to the plane. The AlN layer includes: a first AlN crystal covering the plane and the projections with tips of the projections being exposed; second AlN crystals protruding from the tips of the projections along the normal direction and each having a shape of a column whose cross-sectional area increases as a distance from a tip of a corresponding projection increases; and a third AlN crystal as a layer interconnecting ends of the second AlN crystals, opposite the single crystal substrate.


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