The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10693393 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 23, 2020

Filed:

May. 23, 2018
Applicant:

University of Manitoba, Winnipeg, CA;

Inventors:

Cyrus Shafai, Winnieg, CA;

Yu Zhou, Winnipeg, CA;

Assignee:

University of Manitoba, Winnipeg, CA;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/06 (2006.01); H02N 1/00 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
H02N 1/006 (2013.01); B81B 3/0037 (2013.01); B81B 2201/038 (2013.01); B81B 2203/04 (2013.01); B81B 2203/053 (2013.01);
Abstract

A new tri-electrode topology reduces the control voltage requirement for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force of the higher voltage drive electrode, whose voltage remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode's modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke.


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Shafai, Cyrus. (2020). Electrostatic actuator with tri-electrode topology (U.S. Patent No. 10693393). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10693393

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