The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2020

Filed:

Sep. 25, 2017
Applicant:

Toyoda Gosei Co., Ltd., Kiyosu-shi, JP;

Inventors:

Miki Moriyama, Kiyosu, JP;

Shiro Yamazaki, Kiyosu, JP;

Shohei Kumegawa, Kiyosu, JP;

Assignee:

TOYODA GOSEI CO., LTD., Kiyosu-shi, Aichi-ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 19/02 (2006.01); H01L 31/18 (2006.01); C30B 29/40 (2006.01); C30B 9/12 (2006.01); C30B 19/12 (2006.01); C30B 25/02 (2006.01); C30B 9/10 (2006.01); C30B 19/00 (2006.01); C30B 9/06 (2006.01); C30B 25/18 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1856 (2013.01); C30B 9/06 (2013.01); C30B 9/10 (2013.01); C30B 9/12 (2013.01); C30B 19/00 (2013.01); C30B 19/02 (2013.01); C30B 19/12 (2013.01); C30B 25/02 (2013.01); C30B 25/18 (2013.01); C30B 29/406 (2013.01); Y02E 10/544 (2013.01);
Abstract

The seed substrate comprises a base substrate and a base layer comprising a Group III nitride semiconductor formed on the base substrate, which has a high dislocation density region and a low dislocation density region. The planar pattern of the high dislocation density region is a honeycomb pattern. A hollow exists between the base substrate and the low dislocation density region. The object layer is grown through a flux method using the seed substrate. The high dislocation density region is melted back at an initial stage of crystal growth, and thereafter, the object layer is grown on the top surface of the low dislocation density region. A cavity remains between the high dislocation density region and the object layer. The presence of the cavity and the hollow makes easy to peel the object layer from the seed substrate.


Find Patent Forward Citations

Loading…