The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2020

Filed:

Mar. 29, 2019
Applicant:

Sharp Kabushiki Kaisha, Sakai, Osaka, JP;

Inventors:

Kenichiro Nakamatsu, Sakai, JP;

Tokio Taguchi, Sakai, JP;

Kohji Shinkawa, Sakai, JP;

Mai Takasaki, Sakai, JP;

Tadashi Iwamatsu, Sakai, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/02 (2006.01); H01L 21/02 (2006.01); H01L 21/768 (2006.01); H01J 9/02 (2006.01);
U.S. Cl.
CPC ...
H01J 3/021 (2013.01); H01J 9/025 (2013.01); H01L 21/02145 (2013.01); H01L 21/76801 (2013.01);
Abstract

A method of producing an electron emitting device includes: step A of providing an aluminum substrate or providing an aluminum layer supported by a substrate; step B of anodizing a surface of the aluminum substrate or a surface of the aluminum layer to form a porous alumina layer having a plurality of pores; step C of applying Ag nanoparticles in the plurality of pores to allow the Ag nanoparticles to be supported in the plurality of pores; step D of, after step C, applying a dielectric layer-forming solution onto substantially the entire surface of the aluminum substrate or the aluminum layer, the dielectric layer-forming solution containing, in an amount of not less than 7 mass % but less than 20 mass %, a polymerization product having siloxane bonds; step E of, after step D, at least reducing a solvent contained in the dielectric layer-forming solution to form the dielectric layer; and step F of forming an electrode on the dielectric layer.


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