The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2020

Filed:

Feb. 26, 2018
Applicants:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Toshiba Electronic Devices & Storage Corporation, Tokyo, JP;

Inventor:

Masako Kodera, Kanazawa Ishikawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G06T 7/00 (2017.01); H01L 21/66 (2006.01); G06T 7/40 (2017.01); H01L 29/16 (2006.01); H01L 29/205 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
G06T 7/001 (2013.01); G06T 7/40 (2013.01); H01L 21/67288 (2013.01); H01L 22/12 (2013.01); G06T 2207/10056 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01); H01L 29/16 (2013.01); H01L 29/1608 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01);
Abstract

A crystal analysis apparatus includes a first storage unit storing a crystal lattice image of a crystal region of a sample and a reference crystal lattice image for the crystal region of the sample. A first image processing unit is configured to generate a moiré image from the crystal lattice image and the reference crystal lattice image. A second storage unit stores a predetermined correspondence relationship between a moiré fringe pattern in the moiré image and a crystal defect in the crystal region or a predetermined correspondence relationship between the moiré fringe pattern in the moiré image and a crystal strain in the crystal region. An analysis unit is configured to compare the moiré fringe pattern in the moiré image to predetermined correspondence relationships stored in the second storage unit.


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