The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2020

Filed:

Nov. 22, 2019
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Masaki Kato, Yokohama, JP;

Tohru Kiuchi, Tokyo, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/16 (2006.01); G03F 7/24 (2006.01); G03F 9/00 (2006.01); G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70366 (2013.01); G03F 7/16 (2013.01); G03F 7/20 (2013.01); G03F 7/24 (2013.01); G03F 7/70 (2013.01); G03F 7/70641 (2013.01); G03F 7/70758 (2013.01); G03F 7/70775 (2013.01); G03F 7/70791 (2013.01); G03F 9/00 (2013.01); G03F 7/42 (2013.01);
Abstract

A pattern forming apparatus comprising: a rotary drum that includes a cylindrical outer circumferential surface which is curved at a predetermined radius from a predetermined center line, that rotates about the center line in a state in which a part of a sheet substrate is supported in a length direction of the sheet substrate along the outer circumferential surface; a pattern forming part that forms the pattern on the sheet substrate at a first specific position; a scale disk that is fixed to an end portion of the rotary drum in a direction in which the center line extends while being coaxial with the center line and that includes a circular scale; and a first reading mechanism that is arranged to oppose with the scale formed at the outer circumferential surface of the scale disk, that is arranged at substantially same azimuth as an azimuth.


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