The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2020
Filed:
Sep. 07, 2016
Applicant:
IN Cheol Lee, Hwaseong-si, KR;
Inventor:
In Cheol Lee, Hwaseong-si, KR;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F03C 2/00 (2006.01); F03C 4/00 (2006.01); F04C 15/00 (2006.01); F04C 29/04 (2006.01); F04C 25/02 (2006.01); F25B 21/02 (2006.01); F04C 18/18 (2006.01); F04C 2/10 (2006.01); F04C 29/02 (2006.01); F01P 3/20 (2006.01); F04C 28/28 (2006.01); F01P 5/12 (2006.01); F01P 11/04 (2006.01); F01P 11/08 (2006.01); F01P 11/16 (2006.01); F01P 3/00 (2006.01); F04C 18/16 (2006.01);
U.S. Cl.
CPC ...
F04C 29/04 (2013.01); F01P 3/20 (2013.01); F04C 2/10 (2013.01); F04C 15/00 (2013.01); F04C 18/18 (2013.01); F04C 25/02 (2013.01); F04C 28/28 (2013.01); F04C 29/021 (2013.01); F04C 29/025 (2013.01); F04C 29/028 (2013.01); F04C 29/042 (2013.01); F25B 21/02 (2013.01); F01P 5/12 (2013.01); F01P 11/04 (2013.01); F01P 11/08 (2013.01); F01P 11/16 (2013.01); F01P 2003/006 (2013.01); F04C 18/16 (2013.01); F04C 29/02 (2013.01); F04C 2220/12 (2013.01); F04C 2240/81 (2013.01); F25B 2321/023 (2013.01); F25B 2321/0212 (2013.01); F25B 2321/0252 (2013.01); Y02P 80/156 (2015.11);
Abstract
The present invention relates to a technology of efficiently cooling a vacuum pump that produces a vacuum in a process chamber of a semiconductor manufacturing facility. The present invention provides a new type of vacuum pump cooling method that keeps the internal temperature of a vacuum pump at a predetermined level by circulating oil through rotors of the vacuum pump, such that it is possible to prevent a rapid increase in the temperature of the vacuum pump and smoothly lubricate bearings at the early stage of operation, whereby it is possible to ensure stability when performing processes and operating the pump and economically maintain the facility.