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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10690135 B1

PDFFull Text
Date of Patent:
Jun. 23, 2020

Filed:

Sep. 07, 2016

Vacuum pump with cooling apparatus

Applicant:

IN Cheol Lee, Hwaseong-si, KR;

Inventor:

In Cheol Lee, Hwaseong-si, KR;

Assignee:

Other;

Attorney:

Hauptman Ham, LLP

Primary Examiner:

Theresa Trieu

Int. Cl.
CPC ...
F03C 2/00 (2006.01); F03C 4/00 (2006.01); F04C 15/00 (2006.01); F04C 29/04 (2006.01); F04C 25/02 (2006.01); F25B 21/02 (2006.01); F04C 18/18 (2006.01); F04C 2/10 (2006.01); F04C 29/02 (2006.01); F01P 3/20 (2006.01); F04C 28/28 (2006.01); F01P 5/12 (2006.01); F01P 11/04 (2006.01); F01P 11/08 (2006.01); F01P 11/16 (2006.01); F01P 3/00 (2006.01); F04C 18/16 (2006.01);
U.S. Cl.
CPC ...
F04C 29/04 (2013.01); F01P 3/20 (2013.01); F04C 2/10 (2013.01); F04C 15/00 (2013.01); F04C 18/18 (2013.01); F04C 25/02 (2013.01); F04C 28/28 (2013.01); F04C 29/021 (2013.01); F04C 29/025 (2013.01); F04C 29/028 (2013.01); F04C 29/042 (2013.01); F25B 21/02 (2013.01); F01P 5/12 (2013.01); F01P 11/04 (2013.01); F01P 11/08 (2013.01); F01P 11/16 (2013.01); F01P 2003/006 (2013.01); F04C 18/16 (2013.01); F04C 29/02 (2013.01); F04C 2220/12 (2013.01); F04C 2240/81 (2013.01); F25B 2321/023 (2013.01); F25B 2321/0212 (2013.01); F25B 2321/0252 (2013.01); Y02P 80/156 (2015.11);
Abstract

The present invention relates to a technology of efficiently cooling a vacuum pump that produces a vacuum in a process chamber of a semiconductor manufacturing facility. The present invention provides a new type of vacuum pump cooling method that keeps the internal temperature of a vacuum pump at a predetermined level by circulating oil through rotors of the vacuum pump, such that it is possible to prevent a rapid increase in the temperature of the vacuum pump and smoothly lubricate bearings at the early stage of operation, whereby it is possible to ensure stability when performing processes and operating the pump and economically maintain the facility.

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Lee, In. (2020). Vacuum pump with cooling apparatus (U.S. Patent No. 10690135). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10690135

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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