The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2020

Filed:

Jul. 06, 2016
Applicants:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Mimsi Materials Ab, Linkoeping, SE;

Inventors:

Yoshiharu Utsumi, Itami, JP;

Paer Christoffer Arumskog, Itami, JP;

Keiichi Tsuda, Itami, JP;

Konstantinos Sarakinos, Linkoeping, SE;

Daniel Gunnar Magnfaelt, Linkoeping, SE;

Assignees:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Mimsi Materials AB, Linkoeping, SE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/06 (2006.01); C23C 14/35 (2006.01); C23C 28/04 (2006.01); C23C 14/54 (2006.01); C23C 14/02 (2006.01); C23C 30/00 (2006.01); C23C 14/34 (2006.01); C23C 28/00 (2006.01); C23C 14/00 (2006.01); C23C 14/50 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0617 (2013.01); C23C 14/0036 (2013.01); C23C 14/021 (2013.01); C23C 14/024 (2013.01); C23C 14/0641 (2013.01); C23C 14/345 (2013.01); C23C 14/3485 (2013.01); C23C 14/35 (2013.01); C23C 14/352 (2013.01); C23C 14/505 (2013.01); C23C 14/541 (2013.01); C23C 14/545 (2013.01); C23C 14/548 (2013.01); C23C 28/044 (2013.01); C23C 28/048 (2013.01); C23C 28/44 (2013.01); C23C 30/005 (2013.01); H01J 37/3467 (2013.01);
Abstract

At least one layer in a coating located on a surface of a substrate is a domain structure layer constituted of two or more domains different in composition. The average value of the size of each of first domains, defined as the diameter of a virtual circumcircle in contact with each first domain, is 1 nm to 10 nm. The average value of the nearest neighbor distance of each first domain, defined as the length of the shortest straight line connecting the center of the circumcircle with the center of another circumcircle adjacent to the circumcircle, is 1 nm to 12 nm. 95% or more of the first domains has a size within ±25% of the average value of the size, and 95% or more of the first domains has a nearest neighbor distance within ±25% of the average value of the nearest neighbor distance.


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