The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2020

Filed:

Apr. 14, 2017
Applicants:

Shanghai Tianma Micro-electronics Co., Ltd., Shanghai, CN;

Tianma Micro-electronics Co., Ltd., Shenzhen, CN;

Inventors:

Yaoyang Liu, Shanghai, CN;

Jian Xu, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/24 (2013.01);
Abstract

An evaporation device including an evaporation chamber and mask supporting coils is provided. The mask supporting coils include at least a first coil and a second coil disposed opposite to each other. A mask disposing area is disposed between the first coil and the second coil. A first current is provided in the first coil, and a second current is provided in the second coil, so that a magnetic field with a homogeneous magnetic field strength is generated in the mask disposing area.


Find Patent Forward Citations

Liu, Yaoyang. (2020). Evaporation device (U.S. Patent No. 10689747). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10689747

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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