The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2020
Filed:
May. 01, 2018
Applicant:
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Inventors:
Antonio Sanchez, Tsukuba, JP;
Jean-Marc Girard, Versailles, FR;
Grigory Nikiforov, Bridgewater, NJ (US);
Nicolas Blasco, Echirolles, FR;
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C01G 23/02 (2006.01); C07F 7/28 (2006.01); C23C 16/455 (2006.01); C23C 16/14 (2006.01); C23C 16/34 (2006.01);
U.S. Cl.
CPC ...
C07F 7/28 (2013.01); C23C 16/14 (2013.01); C23C 16/34 (2013.01); C23C 16/45553 (2013.01);
Abstract
Titanium-containing film forming compositions comprising titanium halide-containing precursors are disclosed. Also disclosed are methods of synthesizing and using the disclosed precursors to deposit Titanium-containing films on one or more substrates via vapor deposition processes.
Sanchez, Antonio. (2020). Titanium-containing film forming compositions for vapor deposition of titanium-containing films (U.S. Patent No. 10689405). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10689405
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile