The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2020

Filed:

Mar. 06, 2017
Applicant:

Core Flow Ltd., Daliyat el Carmel, IL;

Inventor:

Ronen Lautman, Haifa, IL;

Assignee:

CORE FLOW LTD., Daliyat El-Karmel, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 51/03 (2006.01); B65G 49/06 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B65G 49/065 (2013.01); B65G 49/06 (2013.01); B65G 51/03 (2013.01); H01L 21/67784 (2013.01); B65G 2249/04 (2013.01);
Abstract

A noncontact support platform includes pressure ports distributed on a surface of a table, each connected to a pressure source. Vacuum ports are distributed on the surface of the table, each connected to a vacuum source. Outward flow through the pressure ports and inward flow through the vacuum ports form a fluid cushion to support a workpiece at a nonzero distance from the table. A plurality of channels each connect at least two of the vacuum ports to enable flow of fluid between the connected vacuum ports. When one of the connected vacuum ports is covered by an edge of the workpiece and the other is not, a suction force that is exerted by the connected vacuum ports on the edge is weaker than the suction force that is exerted on a part of the workpiece where both of the connected vacuum ports are covered.


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