The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Mar. 14, 2019
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Koichi Morozumi, Shiojiri, JP;
Hiromu Miyazawa, Azumino, JP;
Toshihiro Shimizu, Fujimi, JP;
Ichiro Asaoka, Fujimi, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); B41J 2/14 (2006.01); H01L 41/083 (2006.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); B41J 2/14201 (2013.01); B41J 2/14233 (2013.01); H01L 41/0815 (2013.01); H01L 41/0838 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14258 (2013.01);
Abstract
A piezoelectric element includes a first electrode disposed over a substrate, an orientation control layer disposed over the first electrode and containing titanium, a piezoelectric layer disposed over the orientation control layer and having a perovskite crystal structure, and a second electrode disposed over the piezoelectric layer. The orientation control layer has a thickness in the range of 5.0 nm to 22.0 nm.