The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2020

Filed:

Mar. 25, 2018
Applicant:

Carl Zeiss Industrielle Messtechnik Gmbh, Oberkochen, DE;

Inventors:

Malte Langmack, Aalen, DE;

Steffen Strauss, Aalen-Waldhausen, DE;

Wolfgang Strauss, Staig, DE;

Raphael Koch, Neu-Ulm, DE;

Christof Poglitsch, Aalen, DE;

Holger Hofmann, Aalen, DE;

Nikolai Zeller, Jagstzell, DE;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F16C 32/06 (2006.01);
U.S. Cl.
CPC ...
F16C 32/0618 (2013.01); F16C 32/067 (2013.01); F16C 32/0662 (2013.01);
Abstract

An air bearing for movably bearing at least two elements includes a bearing main body with a first air outflow channel and a second air outflow channel. The first air outflow channel is supplied with air via at least one first air delivery device. The second air outflow channel is supplied with air via at least one second air delivery device. A sensor detects at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and a controller adjusts the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.


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