The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Jan. 06, 2018
Applicant:
Shimadzu Corporation, Kyoto, JP;
Inventors:
Masaya Nakamura, Kyoto, JP;
Junichiro Kozaki, Kyoto, JP;
Atsuo Nakatani, Kyoto, JP;
Nobuyuki Hirata, Kyoto, JP;
Assignee:
Shimadzu Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04D 27/00 (2006.01); H01L 21/67 (2006.01); F16K 51/02 (2006.01); F16K 31/04 (2006.01); F16K 3/06 (2006.01); F04D 19/04 (2006.01); F04D 25/06 (2006.01); F16K 3/04 (2006.01); F04D 29/40 (2006.01);
U.S. Cl.
CPC ...
F04D 27/002 (2013.01); F04D 19/048 (2013.01); F04D 27/001 (2013.01); F16K 3/06 (2013.01); F16K 31/041 (2013.01); F16K 51/02 (2013.01); H01L 21/67017 (2013.01); F04D 25/06 (2013.01); F04D 29/403 (2013.01); F16K 3/04 (2013.01);
Abstract
A vacuum valve connected to a vacuum pump, comprises: a valve plate to be openably/closably driven; a drive section configured to openably/closably drive the valve plate; a signal input section to which a pump information signal indicating an operation state of the vacuum pump is input; and a valve control section configured to control operation of the valve plate based on the input pump information signal.