The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Feb. 25, 2014
Asm Ip Holding B.v., Almere, NL;
Lucian C. Jdira, Almere, NL;
Herbert Terhorst, Amersfort, NL;
Michael Halpin, Scottsdale, AZ (US);
Carl White, Gilbert, AZ (US);
Todd Robert Dunn, Cave Creek, AZ (US);
Eric Shero, Phoenix, AZ (US);
Melvin Verbass, Lelystad, NL;
Christopher Wuester, Chandler, AZ (US);
Kyle Fondurulia, Phoenix, AZ (US);
ASM IP Holding B.V., Versterkerstraat 8, Almere 1322 AP, NL;
Abstract
A gas inlet system for a wafer processing reactor includes a tubular gas manifold conduit adapted to be connected to a gas inlet port of the wafer processing reactor; and gas feeds including a first feed for feeding a first gas into the tubular gas manifold conduit and a second feed for feeding a second gas into the tubular gas manifold conduit. Each feed has two or more injection ports connected to the tubular gas manifold conduit at a first axial position of the tubular gas manifold conduit, and the injection ports of each of the gas feeds are evenly distributed along a circumference of the tubular gas manifold conduit at the first axial position.