The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Nov. 07, 2017
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Toshiyuki Kamiya, Fujimi, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 3/00 (2006.01); G01L 5/00 (2006.01); B25J 13/08 (2006.01); G01L 1/16 (2006.01); G01G 3/13 (2006.01); G01G 3/16 (2006.01); G01L 5/22 (2006.01); H01L 41/047 (2006.01);
U.S. Cl.
CPC ...
B25J 13/085 (2013.01); G01G 3/13 (2013.01); G01G 3/165 (2013.01); G01L 1/165 (2013.01); G01L 1/167 (2013.01); G01L 5/226 (2013.01); H01L 41/047 (2013.01);
Abstract
A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.