The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2020

Filed:

Aug. 04, 2016
Applicant:

Ap Systems Inc., Gyeonggi-do, KR;

Inventors:

Jong-Kab Park, Gyenggi-do, KR;

Bo-Ram Kim, Gyeonggi-do, KR;

Jun-Gyu Hur, Busan, KR;

Doh-Hoon Kim, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/364 (2014.01); C23C 14/04 (2006.01); H01L 51/00 (2006.01); B23K 26/0622 (2014.01); B23K 26/082 (2014.01); G03F 7/30 (2006.01); H01L 51/56 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); B23K 26/0622 (2015.10); B23K 26/082 (2015.10); B23K 26/364 (2015.10); C23C 14/042 (2013.01); G03F 7/30 (2013.01); H01L 51/56 (2013.01); B23K 2101/40 (2018.08);
Abstract

The present invention discloses a method of manufacturing a shadow mask, wherein hybrid processing is used to form a mask pattern on the shadow mask, the method includes: forming a laser-processed pattern by irradiating a laser beam from above a base; and forming a wet-etched pattern that continues from the laser-processing pattern, by performing wet etching from above the base or from below the base on which the laser-processed pattern is formed. The present invention uses hybrid processing including wet etching and laser processing for manufacturing a shadow mask. The method has an effect on solving the productivity degradation of the conventional laser processing and provides a shadow mask with high quality using wet etching.


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