The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2020

Filed:

Dec. 22, 2016
Applicant:

Imec Vzw, Leuven, BE;

Inventors:

Shih-Hung Chen, Heverlee, BE;

Dimitri Linten, Boortmeerbeek, BE;

Geert Hellings, Halle, BE;

Assignee:

IMEC vzw, Leuven, BE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/417 (2006.01); H01L 29/10 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7816 (2013.01); H01L 29/063 (2013.01); H01L 29/0649 (2013.01); H01L 29/0653 (2013.01); H01L 29/0692 (2013.01); H01L 29/0696 (2013.01); H01L 29/0847 (2013.01); H01L 29/0869 (2013.01); H01L 29/0886 (2013.01); H01L 29/1095 (2013.01); H01L 29/41791 (2013.01); H01L 29/7835 (2013.01); H01L 29/7851 (2013.01);
Abstract

An LDMOS device in FinFET technology is disclosed. In one aspect, the device includes a first region substantially surrounded by a second region of different polarity. The device further includes a first fin in the first region, extending into the second region, the first fin including a doped source region connected with a first local interconnect. The device further includes a second fin in the second region, including a doped drain region connected with a second local interconnect. The device further includes a third fin parallel with the first and second fins including a doped drain region connected with the second local interconnect. The device further includes a gate over the first fin at the border between the first and second regions. A first current path runs over the first and second fins. A second current path runs over and perpendicular to the first fin towards the third fin.


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