The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2020

Filed:

Nov. 03, 2015
Applicant:

The Regents of the University of California, Oakland, CA (US);

Inventors:

Shadi A. Dayeh, San Diego, CA (US);

Renjie Chen, Albuquerque, NM (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/285 (2006.01); H01L 21/18 (2006.01); H01L 27/06 (2006.01); H01L 23/00 (2006.01); G02B 6/13 (2006.01); H01L 21/8252 (2006.01); H01S 5/02 (2006.01); H01L 21/8258 (2006.01);
U.S. Cl.
CPC ...
H01L 24/83 (2013.01); G02B 6/13 (2013.01); H01L 21/185 (2013.01); H01L 21/187 (2013.01); H01L 21/28575 (2013.01); H01L 21/8252 (2013.01); H01L 24/29 (2013.01); H01L 27/0605 (2013.01); H01S 5/0215 (2013.01); H01L 21/8258 (2013.01); H01L 2224/29082 (2013.01); H01L 2224/29155 (2013.01); H01L 2224/29164 (2013.01); H01L 2224/29166 (2013.01); H01L 2224/29171 (2013.01); H01L 2224/29184 (2013.01); H01L 2224/29187 (2013.01); H01L 2224/8383 (2013.01); H01L 2224/83203 (2013.01); H01L 2924/05042 (2013.01); H01L 2924/05432 (2013.01); H01L 2924/05442 (2013.01); H01L 2924/20107 (2013.01);
Abstract

A method for integrating III-V semiconductor materials onto a rigid host substrate deposits a thin layer of reactive metal film on the rigid host substrate. The layer can also include a separation layer of unreactive metal or dielectric, and can be patterned. The unreactive metal pattern can create self-aligned device contacts after bonding is completed. The III-V semiconductor material is brought into contact with the thin layer of reactive metal. Bonding is by a low temperature heat treatment under a compressive pressure. The reactive metal and the functional semiconductor material are selected to undergo solid state reaction and form a stable alloy under the low temperature heat treatment without degrading the III-V material. A semiconductor device of the invention includes a functional III-V layer bonded to a rigid substrate via an alloy of a component of the functional III-V layer and a metal that bonds to the rigid substrate.


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