logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10679885 B1

PDFFull Text
Date of Patent:
Jun. 09, 2020

Filed:

Jun. 13, 2018

Substrate support assembly with deposited surface features

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Wendell Glenn Boyd, Jr., Morgan Hill, CA (US);

Vijay D. Parkhe, San Jose, CA (US);

Teng-Fang Kuo, Santa Clara, CA (US);

Zhenwen Ding, Santa Clara, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Danny Nguyen

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/687 (2006.01); C03C 17/00 (2006.01); G03F 7/20 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); C03C 17/00 (2013.01); H01L 21/6875 (2013.01); H01L 21/68757 (2013.01); G03F 7/707 (2013.01); H01L 21/6831 (2013.01); H02N 13/00 (2013.01);
Abstract

An electrostatic chuck comprises a ceramic body comprising an embedded electrode and a first ceramic coating on a surface of the ceramic body, wherein the first ceramic coating fills pores in the ceramic body. The electrostatic chuck further comprises a second ceramic coating on the first ceramic coating and a plurality of elliptical mesas on the second ceramic coating, the plurality of elliptical mesas having rounded edges.

Find Patent Forward Citations

Boyd, Jr., Wendell. (2020). Substrate support assembly with deposited surface features (U.S. Patent No. 10679885). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10679885

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…