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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10678046 B1

PDFFull Text
Date of Patent:
Jun. 09, 2020

Filed:

Apr. 23, 2018

Packages for microelectromechanical system (mems) mirror and methods of manufacturing the same

Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Cyrus Ghahremani, Regensburg, DE;

Horst Theuss, Wenzenbach, DE;

Assignee:

Infineon Technologies AG, , DE;

Attorney:

Design IP

Primary Examiner:

Euncha P Cherry

Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01S 7/486 (2020.01); G02B 26/10 (2006.01); G01S 7/481 (2006.01); G02B 27/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); B81B 7/007 (2013.01); B81C 1/00269 (2013.01); G01S 7/4817 (2013.01); G01S 7/4868 (2013.01); G02B 26/105 (2013.01); G02B 27/0006 (2013.01);
Abstract

A microelectromechanical system (MEMS) package assembly and a method of manufacturing the same are provided for Light Detection and Ranging (LIDAR) systems. A MEMS package assembly includes a MEMS chip including a front-side surface and a back-side surface, the MEMS chip further including a LIDAR MEMS mirror configured to receive light and reflect the light as reflected light; and a cavity cap disposed on the front-side surface of the MEMS chip and forms a cavity that surrounds the LIDAR MEMS mirror such that the LIDAR MEMS mirror is sealed from an environment, the cavity cap having an asymmetrical shape such that a transmission surface of the cavity cap, through which the light and the reflected light is transmitted, is tilted at a tilt angle with respect to the front-side surface of the MEMS chip.

Find Patent Forward Citations

Ghahremani, Cyrus. (2020). Packages for microelectromechanical system (mems) mirror and methods of manufacturing the same (U.S. Patent No. 10678046). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10678046

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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