The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2020

Filed:

Jul. 13, 2017
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Ananthkrishna Jupudi, Singapore, SG;

Yueh Sheng Ow, Singapore, SG;

Jacob Newman, Palo Alto, CA (US);

Preetham Rao, Singapore, SG;

Yuichi Wada, Chiba, JP;

Vinodh Ramachandran, Singapore, SG;

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 29/08 (2006.01); H01L 21/67 (2006.01); H05B 6/80 (2006.01); H05B 6/64 (2006.01);
U.S. Cl.
CPC ...
G01R 29/0892 (2013.01); G01R 29/0871 (2013.01); H01L 21/67115 (2013.01); H01L 21/67253 (2013.01); H05B 6/6467 (2013.01); H05B 6/80 (2013.01); H05B 6/806 (2013.01);
Abstract

An apparatus for relaying microwave field intensity in a microwave cavity. In some embodiments, the apparatus comprises a microwave transparent substrate with at least one Radio Frequency (RF) detector that is capable of detecting a microwave field and generating a signal associated with a field intensity of the detected microwave field and a transmitter that receives the signal associated with the detected microwave field from the RF detector and transmits or stores information about the detected microwave field intensity. In some embodiments, the apparatus relays the microwave intensity via a wired, wireless, or optical transmitter located in proximity of the RF detector.


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