The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2020

Filed:

Jul. 05, 2017
Applicant:

Vega Grieshaber KG, Wolfach, DE;

Inventors:

Volker Allgaier, Haslach i. K., DE;

Holger Gruhler, Tuningen, DE;

Dominik Fehrenbach, Haslach, DE;

Assignee:

Vega Grieshaber KG, Wolfach, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); G01H 11/08 (2006.01); G10K 9/122 (2006.01); H01L 41/04 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
G01H 11/08 (2013.01); G10K 9/122 (2013.01); H01L 41/042 (2013.01); H01L 41/1132 (2013.01); H01L 41/1138 (2013.01);
Abstract

The a vibration sensor comprising a membrane that can be stimulated so as to oscillate by means of a piezoelectric drive, and a mechanical oscillator arranged on the membrane, at least one piezoelectric element of the drive comprising at least one first electrical contact structure on an upper side of the piezoelectric element and at least one second electrical contact structure on a lower side of the piezoelectric element, such that the at least one piezoelectric element is designed so that an active area of the piezoelectric element corresponds to an area of a mechanical deformation of the unidirectional curvature of the membrane, during a pre-defined eigenmode of the mechanical oscillator.


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