The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2020
Filed:
Aug. 14, 2017
Applicant:
Sitime Corporation, Santa Clara, CA (US);
Inventors:
Charles I. Grosjean, Los Gatos, CA (US);
Nicholas Miller, Sunnyvale, CA (US);
Paul M. Hagelin, Saratoga, CA (US);
Ginel C. Hill, Sunnyvale, CA (US);
Joseph C. Doll, Mountain View, CA (US);
Assignee:
SiTime Corporation, Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); H01L 41/27 (2013.01); H01L 27/20 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00698 (2013.01); H01L 27/20 (2013.01); H01L 41/27 (2013.01); B81C 1/00158 (2013.01); B81C 2201/0171 (2013.01);
Abstract
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.